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Conference Papers Year : 2009

Finite elements study of high mechanical stress in nanostructures for innovative NEMS sensors

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hal-00604197 , version 1 (28-06-2011)

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  • HAL Id : hal-00604197 , version 1

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X. Xu, B. Bercu, L. Montès. Finite elements study of high mechanical stress in nanostructures for innovative NEMS sensors. 4th IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Jan 2009, Shenzhen, China. ⟨hal-00604197⟩
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