SiC High-k dielectrics Phase transition Thin films Nanostructuring Hafnium silicate Rare earth XRD M-lines Feature erasure Waveguides Multilayers RF magnetron sputtering Raman Silicon nanoclusters Neodymium Laser pyrolysis Nanostructure Pulvérisation cathodique Pulvérisation magnétron radiofréquence Microstructure physique Cerium Semiconductors MoS2 Hybrid materials Structural properties Oxide interface Films Terbium Cathodoluminescence Photovoltaic Pulsed laser deposition CoMoS Erbium Raman scattering Photoluminescence Hillocks Epitaxy Silicium Energy transfer Silicon nitride Luminescence Microstructure physics Liposomes Citric acid Si nanocluster ADE-FDTD AFM Rare earths Grazing incidence X-ray diffraction Refractive index Irradiation Nanoparticles Radiofrequency magnetron sputtering Nanoparticules Guide d'onde Al2O3 Infrared absorption Hafnium silicates Fluorescence Sputtering FTIR Nanostructures GENOMIQUE Thin film Terres rares Waveguide Lifetime Matériaux hybrides Couches minces Electroluminescence Doping Reactive magnetron sputtering Atom probe tomography Optical properties Silicon photonics Computational electromagnetic methods Couches minces semi-conductrices Crystal structure Optical amplifiers Oxide materials Quantum-well Microstructure Nanostructured materials IR spectroscopy CO adsorption Silicon Electron paramagnetic resonance Si-rich silicon oxide Down-conversion Friction Copper HR STEM-HAADF Conductivity Magnetron sputtering Rare-earth ions PZT Oxides Silicon nanocrystals Oxygen vacancies