An innovative NEMS pressure sensor approach based on hetero-nanostructures - Université Pierre et Marie Curie Access content directly
Conference Papers Year : 2009
No file

Dates and versions

hal-00603881 , version 1 (27-06-2011)

Identifiers

  • HAL Id : hal-00603881 , version 1

Cite

X. Xu, B. Bercu, F. Lime, L. Montès. An innovative NEMS pressure sensor approach based on hetero-nanostructures. 18th Materials For Advanced Metallization Conference, Mar 2009, Grenoble, France. ⟨hal-00603881⟩
54 View
0 Download

Share

Gmail Facebook X LinkedIn More