Wavefront Sensing for Evaluation of Extreme Ultraviolet Microscopy - ENSTA Paris - École nationale supérieure de techniques avancées Paris Access content directly
Journal Articles Sensors Year : 2020

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hal-03052035 , version 1 (10-12-2020)

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Mabel Ruiz-Lopez, Masoud Mehrjoo, Barbara Keitel, Elke Plönjes, Domenico Alj, et al.. Wavefront Sensing for Evaluation of Extreme Ultraviolet Microscopy. Sensors, 2020, 20 (22), pp.6426. ⟨10.3390/s20226426⟩. ⟨hal-03052035⟩
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