High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range - ENSTA Paris - École nationale supérieure de techniques avancées Paris Accéder directement au contenu
Article Dans Une Revue Optics Letters Année : 2020

High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range

Résumé

We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond λ / 39 root mean square (rms) at λ = 32 n m . The sensor is suitable for wave front measurement in the 10 nm to 45 nm spectral regime. This compact wave front sensor is high-vacuum compatible and designed for in situ operations, allowing wide applications for up-to-date EUV sources or high-NA EUV optics.

Mots clés

Fichier non déposé

Dates et versions

hal-03052048 , version 1 (10-12-2020)

Identifiants

Citer

Lu Li, Jayanath C P Koliyadu, Hannah Donnelly, Domenico Alj, Olivier Delmas, et al.. High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range. Optics Letters, 2020, 45 (15), pp.4248. ⟨10.1364/OL.396356⟩. ⟨hal-03052048⟩
72 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More